Product Index :: Sensing Solutions :: Photo Microsensors :: Application

EE-SPY801/802 Wafer Carrier Mounting Photomicrosensor

Photomicrosensors for Detecting Wafer-carrier Mounting

• The mounting position is set with a pedestal.

• The contact surface with the wafer carrier uses a special chemical-resistant fluoro-resin.

• The unique optical system enables stable detection of almost all wafer-carriers.

• Light modulation effectively reduces external light interference.

• Utilizes talc-free clean cables.