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The E32-T61 features a temperature-resistant fiber for stable wafer detection at high temperature of 300°C or higher.
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Heat-resistant fiber sensor that could be used in an oven at 350°C were not available. Therefore, two fiber sensors were used, one before and one after the oven.


This application uses a 350°C heat-resistant Fiber Sensor, which enables detecting the passage of wafers with a set of Fiber Sensors in a heated oven.

Applied Models
E32-T61-S + E3X-HD

Applicable Products

Other Applications