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This application uses a Vacuum Fiber Sensor that can be used under a high vacuum. This Sensor can be used under a 10-5Pa vacuum. The Sensor has 1-channel and 4-channel flange system that you can combine according to the number of Sensors.
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Detect Wafers in Vacuum Conveyor System

Know-How

Sensors that could be used in a vacuum chamber were not available, which prevented you from detecting the presence of wafers.

Benefits

A Fiber Sensor that can be used in a vacuum chamber enables detecting the presence of wafers even in a 10-5Pa vacuum environment.

Applied Models
E32-V + E3X-DA-S

Applicable Products

Other Applications