Wafer-carrier Mounting Photomicrosensors
last update: September 24, 2012
Appearance |
Sensing method |
Sensing distance |
Output configuration | Cable length | Model |
---|---|---|---|---|---|
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Reflective type | 0 to 3 mm (Infrared light) |
Turns ON when wafer carrier is present. |
2 m | EE-SPY801 2M |
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EE-SPY802 2M |
Item | Model |
---|---|
Pedestal | EE9-C01 |
EE9-C02 |
Note: There are no sensor functions provided.
last update: September 24, 2012